Download Handbook of Silicon Based MEMS by Markku Tilli, et al (.PDF)

Handbook of Silicon Based MEMS Materials and Technologies (Micro and Nano Technologies) by Markku Tilli, Veikko Lindroos, Veli-Matti Airaksinen
Requirements: PDF Reader, 14mb
Overview: A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications.
Key topics covered include:
– Silicon as MEMS material
– Material properties and measurement techniques
– Analytical methods used in materials characterization
– Modeling in MEMS
– Measuring MEMS
– Micromachining technologies in MEMS
– Encapsulation of MEMS components
– Emerging process technologies, including ALD and porous silicon
Genre: Engineering

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